Title:
光ナノインプリントリソグラフィ用硬化性組成物およびそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP5196933
Kind Code:
B2
Inventors:
Takayanagi Hill
Yasumasa Kawabe
Yasumasa Kawabe
Application Number:
JP2007249698A
Publication Date:
May 15, 2013
Filing Date:
September 26, 2007
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
B29C59/02; C08F2/44; C08F20/10; C08F20/52; C08F26/02; H01L21/027
Domestic Patent References:
| JP2006110997A | ||||
| JP7062043A |
Foreign References:
| WO2006030625A1 |
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes