Title:
磁気焼鈍装置の熱切換えシステム
Document Type and Number:
Japanese Patent JP4960971
Kind Code:
B2
Abstract:
A heat exchange system and processes for a magnetic annealing tool is provided. The system includes a process chamber housing workpieces to be processed; an element chamber partly surrounding the periphery of the process chamber, at least one means for drawing a vacuum in fluid communication with the process chamber and separately with the element chamber in order to apply a vacuum to either or both of the process and element chamber so as to promote radiation heating of the workpieces; at least one supply of fluid in communication with the process chamber and separately with the element chamber to supply a cooling gas so as to promote conductive cooling of the workpieces; a cooling chamber disposed to surround the element chamber; and means for generating a magnetic field disposed on the outer periphery of the cooling chamber.
Inventors:
Jib, Richard, John
Billingham, John, Fredrick
Duffy, Edward
Oshonesee, Noel
McMahon, Kevin
Ferris, peter
Billingham, John, Fredrick
Duffy, Edward
Oshonesee, Noel
McMahon, Kevin
Ferris, peter
Application Number:
JP2008544349A
Publication Date:
June 27, 2012
Filing Date:
November 15, 2006
Export Citation:
Assignee:
Praxair Technology Incorporated
International Classes:
F27D11/12
Domestic Patent References:
| JP2001135543A | ||||
| JP20017035A |
Attorney, Agent or Firm:
Hideto Asamura
Hajime Asamura
Katsunori Shirae
Yutaka Yoshida
Hajime Asamura
Katsunori Shirae
Yutaka Yoshida