Title:
ヒーターユニット及び熱処理装置
Document Type and Number:
Japanese Patent JP5268103
Kind Code:
B2
Inventors:
Shuji Saito
Yamamoto Kenro
Yamamoto Kenro
Application Number:
JP2008280991A
Publication Date:
August 21, 2013
Filing Date:
October 31, 2008
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H05B3/02; F27B9/04; F27B9/36; F27D11/02
Domestic Patent References:
| JP2000294547A | ||||
| JP2007157661A | ||||
| JP2008081781A | ||||
| JP58090694U |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Ori Akira