PURPOSE: To reduce the output error caused by the change of the thermal deflection quantity (axial direction) of a diaphragm section due to the fluctuation of the temperature difference in the thickness direction of the diaphragm section.
CONSTITUTION: When the pressure of a high-temperature fluid is applied to the measured pressure applied face A of a diaphragm section 20, the diaphragm section 20 is deflected, the deflection is transferred to a strain-sensitive element 6 through pressure transfer members 7, 8, and the strain-sensitive element 6 outputs the electric signal corresponding to the received pressure. The center section of the diaphragm section 2 is recessed to the opposite side of the high- temperature fluid, a heat insulating plate shuts off most of the radiation heat radiated from the high-temperature fluid or the like to the surface A of the diaphragm section 20, thus the deflection of the diaphragm section 2 is reduced, and the output error caused by it is reduced.
HATANAKA MAKOTO
OZAKI SHINJI
NAGASE KAZUYOSHI
