An imprint device, an imprint method, and an article manufacturing method

Title:

An imprint device, an imprint method, and an article manufacturing method

Document Type and Number:

Japanese Patent JP6114861

Kind Code:

B2

Inventors:

Hiroaki Furukawa

Application Number:

JP2016119151A

Publication Date:

April 12, 2017

Filing Date:

June 15, 2016

Export Citation:

Assignee:

Canon Inc

International Classes:

H01L21/027; B29C59/02; G11B5/84

Domestic Patent References:

Attorney, Agent or Firm:

Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu

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