Title:
BASE BOARD FOR RECORDING HEAD AND FABRICATION OF RECORDING HEAD
Document Type and Number:
Japanese Patent JPH0596732
Kind Code:
A
Abstract:
PURPOSE: To provide a highly reliable base board for recording head and the recording head having long service life at high yield.
CONSTITUTION: In the fabrication of a base board 100 for recording head in which a heating part 110, an NPN transistor l20 for driving the heating part 110, and a wiring electrode 104 for connecting the NPN transistor 120 and the heating part 110 are formed on a P-type silicon substrate 1 through photolithography, the wiring electrode 104 is etched while retracting the masking photoresist on the wiring electrode 104 and a protective film 105 is deposited on the wiring electrode 104 while switching the temperature of the base board from low level to high level.
Inventors:
NARUSE YASUHIRO
HAYAKAWA YUKIHIRO
KAMEI SEIJI
FUJITA KATSURA
MATSUMOTO SHIGEYUKI
HAYAKAWA YUKIHIRO
KAMEI SEIJI
FUJITA KATSURA
MATSUMOTO SHIGEYUKI
Application Number:
JP11522391A
Publication Date:
April 20, 1993
Filing Date:
April 20, 1991
Export Citation:
Assignee:
CANON KK
International Classes:
B41J2/05; B41J2/16; H01L21/768; (IPC1-7): B41J2/05; B41J2/16; H01L21/90
Attorney, Agent or Firm:
Wakabayashi Tadashi
Next Patent: JPS596733