To provide a laminated piezoelectric element that reduces a rate of change in the degree of orientation of a crystal particle for composing a piezoelectric substrate layer before and after drive, and has a small decrease in piezoelectric characteristics even after a long-term drive test, and also to provide a method for manufacturing the laminated piezoelectric element and an ejector using the laminated piezoelectric element.
In the laminated piezoelectric element in which the piezoelectric substrate layer 1 and a conductive layer 2 are alternately laminated, the rate of change in the degree of orientation before and after the drive of the crystal grain composing the piezoelectric body layer 1 should be within 5%.
COPYRIGHT: (C)2005,JPO&NCIPI
Ken Okamura
Masaki Terazono
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