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Title:
薄膜の製造装置および製造方法
Document Type and Number:
Japanese Patent JP4806109
Kind Code:
B2
Abstract:
The present invention provides a thin film manufacturing device capable of preventing crack damage of a crucible by, while maintaining a melt state of a film formation material in the crucible, tilting the crucible to discharge substantially the entire amount of film formation material from the crucible. The thin film manufacturing device of the present invention includes: a film forming source 9 including a storage portion having an opening at an upper portion thereof to hold a film formation material 3; an electron gun 5 configured to irradiate the film formation material in the storage portion with an electron beam 6 to melt the film formation material, generate a melt, and evaporate the film formation material; a tilt mechanism 8 configured to tilt the film forming source 9 from a film formation posture to an inclined posture to discharge the melt from the storage portion, the inclined posture being a posture by which the storage portion is not able to hold the melt; a vacuum chamber 22 in which the film forming source and the tilt mechanism are accommodated and a thin film is formed on a substrate; and a vacuum pump 34 configured to discharge air in the vacuum chamber. A trajectory of tilting of the film forming source 9 or a trajectory of the electron beam 6 is controlled such that the melt in the storage portion is continuously irradiated with the electron beam 6 while the film forming source 9 is tilted from the film formation posture to the inclined posture.

Inventors:
Kazuyoshi Honda
Satoshi Yanagi
Taiji Shinokawa
Daisuke Suetsugu
Sadayuki Okazaki
Application Number:
JP2011508236A
Publication Date:
November 02, 2011
Filing Date:
April 02, 2010
Export Citation:
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Assignee:
Panasonic Corporation
International Classes:
C23C14/24; C23C14/14; C23C14/30; F27B14/04; F27B14/10; F27B14/14; F27B14/18; F27D11/08
Domestic Patent References:
JP8335316A
JP7041938A
JP2008195979A
JP7097680A
Attorney, Agent or Firm:
Patent business corporation Yuko patent office



 
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