Title:
TFTアレイ基板の製造方法
Document Type and Number:
Japanese Patent JP5151782
Kind Code:
B2
Abstract:
To provide a method for manufacturing a thin film transistor (TFT) array substrate in which pixel electrodes and contact holes are formed with simple processing.
The method includes: a step of forming an insulating film; a step of forming a conductive film on the insulating film; a step of forming a pixel electrode with an aperture by patterning the conductive film; and a step of forming the contact hole for communicating with the insulating film through the aperture by an etching method using the pixel electrode with the aperture as an etching mask.
COPYRIGHT: (C)2010,JPO&INPIT
Inventors:
Takashi Morimoto
Jun Yamada
Jun Yamada
Application Number:
JP2008200514A
Publication Date:
February 27, 2013
Filing Date:
August 04, 2008
Export Citation:
Assignee:
Konica Minolta Holdings Co., Ltd.
International Classes:
G09F9/30; G02F1/1343; G02F1/1345; G09F9/00; H01L21/336; H01L21/768; H01L29/786
Domestic Patent References:
| JP10293321A | ||||
| JP11064890A | ||||
| JP2007140520A | ||||
| JP2005123360A | ||||
| JP2005159143A |
Attorney, Agent or Firm:
Shizuo Sano
Inoue On
Inoue On