Title:
METHOD FOR PRODUCING TANTALUM NITRIDE (Ta3 N5)
Document Type and Number:
Japanese Patent JP2017165605
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an industrial production method for TaNwith a low oxygen content.SOLUTION: A method for producing tantalum nitride (TaN) includes nitriding of metal tantalum at 800-950°C in an ammonia gas atmosphere.SELECTED DRAWING: None
Inventors:
TSUNEYODA KAZUHIKO
KISHIMORI CHIKA
KISHIMORI CHIKA
Application Number:
JP2016050360A
Publication Date:
September 21, 2017
Filing Date:
March 15, 2016
Export Citation:
Assignee:
TAIHEIYO CEMENT CORP
International Classes:
C01B21/06
Attorney, Agent or Firm:
Alga Patent Office, a patent business corporation
Toshio Takano
Toshio Nakajima
Masaki Murata
Hiroto Yamamoto
Toshio Takano
Toshio Nakajima
Masaki Murata
Hiroto Yamamoto