Title:
溶射用材料、溶射皮膜および溶射皮膜付部材
Document Type and Number:
Japanese Patent JP6650385
Kind Code:
B2
Abstract:
Provided is a thermal spray material that can form a compact thermal sprayed coating having an enhanced plasma erosion resistance. The herein disclosed art provides a thermal spray material that contains a rare earth element (RE), oxygen (O), and a halogen element (X) as constituent elements and that contains a mixed crystal of a rare earth element oxyhalide (RE-O—X) and a rare earth element halide (REX3).
Inventors:
Masayuki Nagayama
Hiroyuki Ibe
Keiya Masuda
Hiroyuki Ibe
Keiya Masuda
Application Number:
JP2016217287A
Publication Date:
February 19, 2020
Filing Date:
November 07, 2016
Export Citation:
Assignee:
東京エレクトロン株式会社
株式会社フジミインコーポレーテッド
株式会社フジミインコーポレーテッド
International Classes:
C23C4/04; C01F17/00; C23C4/134
Domestic Patent References:
| JP5396672B2 | ||||
| JP2003321761A | ||||
| JP5911036B1 |
Foreign References:
| WO2017115662A1 | ||||
| WO2014002580A1 |
Attorney, Agent or Firm:
Makoto Abe
Michiko Oi
Seiji Tani
Michiko Oi
Seiji Tani