Methods and equipment for sensing the substrate in the load cup

Title:

Methods and equipment for sensing the substrate in the load cup

Document Type and Number:

Japanese Patent JP6322582

Kind Code:

B2

Inventors:

Rishka, David Jay.
Atkinson, Jim K.
Domin, Jonathan Paul
Andrew, Riu

Application Number:

JP2014554731A

Publication Date:

May 09, 2018

Filing Date:

January 11, 2013

Export Citation:

Assignee:

APPLIED MATERIALS,INCORPORATED

International Classes:

H01L21/67; B24B37/00

Domestic Patent References:

Foreign References:

US20050227595
WO2010062840A1

Attorney, Agent or Firm:

Sonoda Yoshitaka
Kobayashi Yoshinori

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