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Patent Searching and Data


Title:
【発明の名称】データ記憶光ディスク用スタンパーを製造するための方法
Document Type and Number:
Japanese Patent JPH11501434
Kind Code:
A
Abstract:
A process for manufacturing an optical data storage disk stamper includes the steps of providing a chemically vapor-deposited, silicon carbide substrate having a toughness of about 4.5 MPa 2ROOT m, a roughness of about 1 nm, and a flatness of about 6 mu m and depositing a negative photoresist on a surface of the substrate. The substrate has a diameter greater than about 120 mm and a thickness greater than about one mm. The negative photoresist then is exposed with a laser to form a negative, data pattern in the photoresist. The photoresist is developed, and the ceramic substrate is ion machined to form the data pattern, in the substrate, such that a spiral track of ridges and lands is formed wherein each ridge has a height of about in a range of 20 to 200 nm. After the data pattern has been ion machined into the substrate, the developed photoresist is stripped from the substrate.

Inventors:
Thomas Gie Bifano
Application Number:
JP50663596A
Publication Date:
February 02, 1999
Filing Date:
July 31, 1995
Export Citation:
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Assignee:
Thomas Gie Bifano
International Classes:
B29C45/26; B29D17/00; C23C16/42; G11B7/26; G11B23/00; (IPC1-7): G11B7/26; C23C16/42
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)