Title:
基板焼成炉の給排気方法
Document Type and Number:
Japanese Patent JP4331784
Kind Code:
B2
More Like This:
Inventors:
Yusuke Muraoka
Miyaji Kyosho
Yasushi Nagashima
Miyaji Kyosho
Yasushi Nagashima
Application Number:
JP2008188665A
Publication Date:
September 16, 2009
Filing Date:
July 22, 2008
Export Citation:
Assignee:
Future Vision Co., Ltd.
Koyo Thermo System Co., Ltd.
Koyo Thermo System Co., Ltd.
International Classes:
F27D7/02; F27B17/00; F27D7/04; F27D17/00; F27D19/00
Domestic Patent References:
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| JP11231943A | ||||
| JP1291092A | ||||
| JP10141868A | ||||
| JP63315576A | ||||
| JP57059665A | ||||
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| JP2001201271A | ||||
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Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita