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Title:
COMPOSITE SILICA GLASS-MADE LIGHT DIFFUSION MEMBER
Document Type and Number:
Japanese Patent JP2017165643
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a composite silica glass-made diffusion member constituted by a composite consisting of a dense silica glass and a porous silica glass, excellent in transmittance of ultraviolet and having no in-plane variation of ultraviolet strength.SOLUTION: There is provided a composite silica glass-made light diffusion member consisting of a dense silica glass and a porous silica glass formed on a surface thereof, the porous silica glass is a porous body having a skeleton consisting of a spherical silica glass, center pore diameter of 10 to 20 μm and porosity of 25 to 40%, the spherical silica glass has average diameter of 30 to 100 μm and average by measuring arithmetic average roughness Ra with measurement length of 1 μm in each spherical silica glass exposed to an outside surface 10 times of 0.8 to 4.0 nm and the porous silica glass has a uniform pore distribution from a boundary surface with the dense silica glass to the outside surface.SELECTED DRAWING: None

Inventors:
ABE YUKI
IWASAKI TAKESHI
SUGANO AKIRA
TAKEDA SOTARO
HASHIMOTO YUTAKA
Application Number:
JP2017016833A
Publication Date:
September 21, 2017
Filing Date:
February 01, 2017
Export Citation:
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Assignee:
COORSTEK KK
International Classes:
C03C17/04; C03C3/06; G02B1/00; G02B5/02
Domestic Patent References:
JP2014114186A2014-06-26
JP2013227206A2013-11-07
JP2004142996A2004-05-20
JPH07300326A1995-11-14
JP2013033188A2013-02-14
JPH11160505A1999-06-18
JPH11292568A1999-10-26
Foreign References:
WO2015009054A12015-01-22
Attorney, Agent or Firm:
Kinoshita Shigeru
Yuko Sawada