Title:
工作物のプラズマ処理方法および装置
Document Type and Number:
Japanese Patent JP2005526914
Kind Code:
A
Abstract:
The invention relates to a method and a device which are used for the plasma treatment of work pieces. Said work piece is inserted into an at least partially evacuatable chamber of a treatment station (3) and the work piece is positioned inside the treatment station of retaining elements. At least one operating agent is at least partially impinged upon by a transporting device (44) which is displaced together with the treatment station on a closed and rotating transport path.
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Inventors:
Ritzenberg Michael
Levin Frank
Muller Hardwig
Vogel Claus
Arnold Gregor
Bere stephan
Lütrinkhaus Henkel Andreas
Vicker Matthias
Klein Jurgen
Levin Frank
Muller Hardwig
Vogel Claus
Arnold Gregor
Bere stephan
Lütrinkhaus Henkel Andreas
Vicker Matthias
Klein Jurgen
Application Number:
JP2004507564A
Publication Date:
September 08, 2005
Filing Date:
May 09, 2003
Export Citation:
Assignee:
SIG Technology Limited
International Classes:
A61L2/14; B01J19/08; B08B7/00; B08B9/42; B29C49/42; B65D23/02; B65G29/00; C03C17/00; C23C14/04; C23C14/50; C23C16/04; C23C16/40; C23C16/44; C23C16/458; C23C16/511; C23C16/54; B05D7/24; (IPC1-7): C23C16/44; A61L2/14; B01J19/08; C23C16/511
Domestic Patent References:
| JP2002540364A | 2002-11-26 | |||
| JP2000316954A | 2000-11-21 | |||
| JP2001518685A | 2001-10-16 |
Foreign References:
| GB547249B | ||||
| WO2002010473A1 | 2002-02-07 |
Attorney, Agent or Firm:
Fujita Akira