Title:
ポジ型レジスト組成物およびレジストパターン形成方法
Document Type and Number:
Japanese Patent JP4668042
Kind Code:
B2
Inventors:
Hiroko Hirosaki
Tomoyuki Ando
Hojo Takuma
Tomoyuki Ando
Hojo Takuma
Application Number:
JP2005336825A
Publication Date:
April 13, 2011
Filing Date:
November 22, 2005
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/039; C08F212/14; C08F220/22; H01L21/027
Domestic Patent References:
| JP2003277443A | ||||
| JP2003002925A | ||||
| JP2003302754A | ||||
| JP2004149754A | ||||
| JP2002091001A | ||||
| JP2002220417A | ||||
| JP2004045448A | ||||
| JP2004217533A | ||||
| JP2004271844A | ||||
| JP2004333548A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai