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Title:
A power detecting device, a robot, an electronic-parts conveying machine, an electronic-parts inspection device, a part processing device, and a mobile
Document Type and Number:
Japanese Patent JP6102341
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a force detection device in which an output drift is reduced and the size is reduced, a robot using the force detection device, an electronic component transport device, an electronic component inspection device, a component processing device and a moving body.SOLUTION: A force detection device 1a includes: a first element 3a and a second element 3b for outputting a voltage according to an external force; and an external force detection circuit for detecting the external force on the basis of the voltage output from the first element 3a and the second element 3b. The first element 3a and the second element 3b have: a sensor having polarization axes Pβ1 and Pβ2, and outputting charges according to the external force along the polarization axes Pβ1 and Pβ2; and a conversion circuit for converting the charges output from the sensor to a voltage. The first element 3a and the second element 3b are arranged in such a manner that the direction of the polarization axis Pβ1 which the sensor of the first element 3a has and the direction of the polarization axis Pβ2 which the sensor of the second element 3b has face the opposite directions mutually.

Inventors:
Takanobu Matsumoto
Toshiyuki Kamiya
Hideaki Oka
Hiroki Kawai
Application Number:
JP2013036773A
Publication Date:
March 29, 2017
Filing Date:
February 27, 2013
Export Citation:
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Assignee:
Seiko Epson Corporation
International Classes:
G01L1/16; B23Q17/09; B25J19/02; G01L5/00; G01L5/16; G01P15/09; G01P15/18
Domestic Patent References:
JP763782A
JP11237403A
JP5742415B2
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai