Title:
【発明の名称】ハロゲン化物を含有しないケイ素含有化合物を酸化させる精密バーナー
Document Type and Number:
Japanese Patent JPH11510778
Kind Code:
A
Abstract:
A precision burner suitable for oxidizing halide-free, silicon-containing compounds, such as octamethylcyclotetrasiloxane (OMCTS), is provided. The burner may include a subassembly (13) which can be precisely mounted on a burner mounting block (107) through the use of an alignment stub (158), a raised face (162) on the burner mounting block (107) and corresponding recess (160) in the back of the subassembly (13). Disclosed and claimed is an apparatus suitable for producing SiO2 containing soot, the apparatus comprising a burner having a burner face. The burner's face includes four concentric regions each for emitting a gas: a first central region (36,90) suitable for emitting a mixture of OMCTS and O2, a second innershield region (38,92) suitable for emitting N2, a third outershield region (40,42,94,96) suitable for emitting O2, and a fourth premix region (44,98) suitable for premissing and emitting a mixture of CH4 and O2. The burner provides more efficient use of halide-free silicon-containing raw materials than prior art burners.
Inventors:
Dessie, Robert Bee
Buyers, Jim, Day.
Kiefer, William Jay
Powers,dale are
Buyers, Jim, Day.
Kiefer, William Jay
Powers,dale are
Application Number:
JP52109696A
Publication Date:
September 21, 1999
Filing Date:
December 19, 1995
Export Citation:
Assignee:
Corning Incorporated
International Classes:
F23D14/38; C03B8/04; C03B19/14; C03B37/014; C03B37/018; C23C16/453; F23D14/02; F23D14/22; F23D14/32; F23G7/06; F23L7/00; (IPC1-7): C03B8/04; C03B19/14; F23D14/22; F23D14/38
Attorney, Agent or Firm:
Seiji Yanagida (1 person outside)