Title:
METHOD FOR REDUCTION OF SPATIAL ENERGY DIFFUSION IN ELECTRON BEAM AND ELECTRON BEAM APPARATUS
Document Type and Number:
Japanese Patent JPH0668833
Kind Code:
A
Abstract:
PURPOSE: To provide a reduction method of spatial energy diffusion in an electron beam and making almost the entire beam current usable, and provide an electron beam device. CONSTITUTION: This method and device relates to energy selection in electron beams. The electron beam device 1 is provided with an energy dispersing member 20, arranged near an electron source 3 for generating an electron beam 7. The energy dispersing member 20 enlarges the electron beam 7 in a dispersing direction. Energy selection is made by selecting a large number of pixels with a local energy width in the image-focusing face 21 of an object 11.
Inventors:
MAST KAREL DIEDERICK VAN DER (NL)
Application Number:
JP2434193A
Publication Date:
March 11, 1994
Filing Date:
February 12, 1993
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV (NL)
International Classes:
G01Q30/06; G01Q30/20; H01J37/05; H01J37/06; H01J37/26; (IPC1-7): H01J37/26; H01J37/05; H01J37/06
Attorney, Agent or Firm:
Akihide Sugimura (5 outside)
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