Title:
SUPERCONDUCTING SUPER-SMALL ELECTRONIC CIRCUIT BASED ON MICROLITHOGRAPHIC PATTERNING OF SUPERCONDUCTIVE COMPOUND AND RELATED MATERIAL
Document Type and Number:
Japanese Patent JPH0613731
Kind Code:
A
Abstract:
PURPOSE: To manufacture a superconducting element by microlithographically providing the superconductive element with a Ba2 Cu3 O5+x thin film, deposited on a substrate and a dopant thin film deposited on the surface of Ba2 Cu3 O5+x thin film by patterning, diffused into the thin film and reacting with Ba2 Cu3 O5+x . CONSTITUTION: A thin-film layer 14 deposited on a substrate 12 consists of Ba2 Cu3 O5+x (0
Inventors:
NIKORASU BUI KOTSUPA
Application Number:
JP6989493A
Publication Date:
January 21, 1994
Filing Date:
March 29, 1993
Export Citation:
Assignee:
US GOVERNMENT (US)
International Classes:
H05K1/09; H01L39/24; H05K3/14; (IPC1-7): H05K3/14; H05K1/09
Attorney, Agent or Firm:
Asahina Sota
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