Title:
【発明の名称】窒化アルミニウム質基板の製造方法
Document Type and Number:
Japanese Patent JP2989975
Kind Code:
B2
Inventors:
OTOSU EIZO
Application Number:
JP31968892A
Publication Date:
December 13, 1999
Filing Date:
November 30, 1992
Export Citation:
Assignee:
KYOSERA KK
International Classes:
H01L23/12; H05K3/46; (IPC1-7): H05K3/46; H01L23/12
Domestic Patent References:
| JP2210894A | ||||
| JP1315187A | ||||
| JP225094A |