Title:
【発明の名称】光データ記憶ディスク・スタンパの製造方法
Document Type and Number:
Japanese Patent JP2000507734
Kind Code:
A
Abstract:
A process for manufacturing an optical data storage disk stamper includes the steps of providing an amorphous electroless nickel substrate including phosphorous in the amount in a range of about 5 to 15 percent by weight having a toughness of about 100 MPa 2ROOT +E,rad +EE m, a roughness in a range of about 1 to 50 nm, and a flatness of about 6 mu m and depositing a negative photoresist on a surface of the substrate. The substrate has a diameter greater than about 120 mm and a thickness greater than about 300 mu m. The negative photoresist then is exposed with a laser to form a negative, data pattern in the photoresist. The photoresist is developed, and the ceramic substrate is ion machined to form the data pattern, in the substrate, such that a spiral track of ridges and lands is formed wherein each ridge has a height of less than about 150 nm. After the data pattern has been ion machined into the substrate, the developed photoresist is stripped from the substrate.
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Inventors:
Bifano, Tamas, Gee
Application Number:
JP53556197A
Publication Date:
June 20, 2000
Filing Date:
April 01, 1997
Export Citation:
Assignee:
Bifano, Tamas, Gee
International Classes:
C23C16/42; B29C45/26; B29D17/00; G11B7/26; G11B23/00; (IPC1-7): G11B7/26; B29D17/00
Attorney, Agent or Firm:
Sanada Yuzo (2 outside)