形状検査方法、構造物の製造方法及び形状検査装置

Title:

形状検査方法、構造物の製造方法及び形状検査装置

Document Type and Number:

Japanese Patent JP5728089

Kind Code:

B2

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Inventors:

Hidekazu Hayashi
Tokio Taguchi
Chiaki Mitsunari

Application Number:

JP2013523887A

Publication Date:

June 03, 2015

Filing Date:

June 29, 2012

Export Citation:

Assignee:

Sharp Corporation

International Classes:

G01N21/27; G01N21/84; H01L21/027

Domestic Patent References:

Foreign References:

WO2011145625A1
WO2011118596A1

Attorney, Agent or Firm:

Atomi International Patent Office

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