PURPOSE: To boil and evaporate water stuck to a material to be washed to surely remove it by heating a high boiling point liquid in which the material to be washed is immersed to a temp. higher than the boiling point of water and lower than the high boiling point liquid.
CONSTITUTION: A water separating tank 1 is filled with a high boiling point liquid 2 of a boiling point higher than that of water. As the high boiling point liquid 2, completely fluorinated liquid, hydrocarbon based solvent, silicone based solvent, terpene based solvent, higher alcohol, etc., are used. A material to be washed 4 is immersed in the high boiling point liquid 2 which is heated by a heater 3 to a temp. higher than the boiling point of water and lower than that of the high boiling point liquid 2. Then, water stuck to the material to be washed 4 is boiled and evaporated to remove the water from the material to be washed 4. Since the water is boiled and evaporated, there is no possibility of the water being dissolved in the high boiling point liquid 2 to produce new waste liquid too.
JPH02184302A | 1990-07-18 | |||
JPH0342002A | 1991-02-22 | |||
JPS5570382A | 1980-05-27 | |||
JPS56155603A | 1981-12-01 |