Title:
基板処理装置、基板処理システムおよび検査周辺露光装置
Document Type and Number:
Japanese Patent JP5410212
Kind Code:
B2
Abstract:
An edge exposure unit includes a projector, a projector holding unit, a substrate rotating unit, an outer edge detecting unit and a surface inspection processing unit. Each component of the projector holding unit operates to move the projector in an X direction and a Y direction. The projector irradiates a peripheral portion of a substrate with light transmitted from a light source for exposure through a light guide. Edge sampling processing is performed based on distribution of an amount of light received in a CCD line sensor of the outer edge detecting unit. Surface inspection processing is performed based on distribution of an amount of light received in a CCD line sensor of the surface inspection processing unit.
Inventors:
Kashiwayama Masato
Yukihiko Inagaki
Kazuya Akiyama
Noriaki Yokono
Taniguchi Isao
Yukihiko Inagaki
Kazuya Akiyama
Noriaki Yokono
Taniguchi Isao
Application Number:
JP2009213093A
Publication Date:
February 05, 2014
Filing Date:
September 15, 2009
Export Citation:
Assignee:
Sokudo corporation
International Classes:
H01L21/027
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Attorney, Agent or Firm:
Yoshito Fukushima