Title:
【発明の名称】音響-光学的に調和可能なフィルタを基礎とする表面走査装置及びその方法
Document Type and Number:
Japanese Patent JPH08500432
Kind Code:
A
Abstract:
A scanning system (10) for inspecting a surface (16) including a light source (30) which generates a beam of light (32) that is reflected, scattered or causes fluorescence at the surface to be inspected. An optical interface (14) receives the beam of light and directs it along a predetermined path extending to and from the surface. An acousto-optic tunable filter (34) tuned to pass light having a wavelength corresponding to a known optical property of a predetermined material is positioned within the path of light. A detector (42) is positioned to receive light emanating from the surface and is configured to monitor the intensity of light at each predetermined wavelength being monitored and generate a corrsponding signal. The system is preferably attached to a scan board (90) thereby enabling the system to be used in scanning a surface. The system also includes a signal processor (22) which processes the signal generated by the detector. The resulting data is displayed by an output device (26).
Inventors:
Person, Lee H
Kendall Bee, Johnson
Doyle, Timothy Y
Kendall Bee, Johnson
Doyle, Timothy Y
Application Number:
JP51939893A
Publication Date:
January 16, 1996
Filing Date:
April 23, 1993
Export Citation:
Assignee:
Siocol Corporation
International Classes:
G01B11/30; F02K9/96; G01B11/06; G01N21/17; G01N21/21; G01N21/31; G01N21/64; G01N21/88; G01N21/93; G01N21/94; G01J3/12; G01N21/59; G01N21/84; (IPC1-7): G01B11/30; F02K9/96; G01N21/21; G01N21/88
Attorney, Agent or Firm:
Kyozo Yuasa (6 people outside)