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Title:
高い全光線透過率を持つポリイミド薄膜上に形成された触覚センサとそれを用いたスイッチングデバイス
Document Type and Number:
Japanese Patent JP7064054
Kind Code:
B2
Abstract:
A light, flexible, and tough thin film having high total light transmittance that can be formed on various three dimensional shapes, and also provides a stably driven tactile sensor, which is an electronic device having the switching function thereof, is provided. The tactile sensor is formed on a polyimide thin film having high total light transmittance, thermal resistance, and a polar component of surface free energy with a specific value, and has a switching device that emits a voltage signal which, through an electronic circuit for controlling noise, stably drives another device. This tactile sensor has a curved or flat surface and has a first electrode, a ferroelectric layer, and a second electrode formed over the polyimide thin film. The switching device as a tactile sensor can drive another device merely by a light touch with a finger, and can be manufactured at a high non-defective rate.

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Inventors:
Jun Okabe
Sunaga Tadahiro
Shizushi Tokito
Tomohito Sekine
Application Number:
JP2021528215A
Publication Date:
May 09, 2022
Filing Date:
June 15, 2020
Export Citation:
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Assignee:
Mitsui Chemicals, Inc.
International Classes:
G01L1/16; B32B7/025; B32B27/34; H01L41/113; H01L41/193; H01L41/257
Domestic Patent References:
JP2015190863A
JP2013021176A
JP2014034590A
Foreign References:
WO2017183678A1
US20140060210
WO2016010003A1
Attorney, Agent or Firm:
Washeda International Patent Office