Title:
CHARGED PARTICLE BEAM DEVICE AND TEMPERATURE CONTROL METHOD OF SAMPLE HOLDER
Document Type and Number:
Japanese Patent JP2017016810
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a stage which has a wide movable range and can cool a sample in a vacuum sample chamber without causing disturbance in obtained images.SOLUTION: The invention relates to a charged particle beam device, including: a sample stage to which a sample holder is fixed; and a stage having a table which moves the sample stage. In the charged particle beam device, the stage has a cooling part which is cooled by a refrigerant and at least parts of the sample table and the table are placed in contact with the cooling part so as to cool the sample holder. The invention can prevent vibrations of the cooling part from being transmitted to the stage without causing a refrigerant transport tube or the like to limit a movable range of the stage and can cool the sample on the stage while maintaining the sample chamber in a vacuum state.SELECTED DRAWING: Figure 1
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Inventors:
MATSUKA DAISUKE
MAKI NOBUYUKI
SUZUKI HIROYUKI
MAKI NOBUYUKI
SUZUKI HIROYUKI
Application Number:
JP2015130563A
Publication Date:
January 19, 2017
Filing Date:
June 30, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/20
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki