Title:
真空炉及びこの真空炉を用いた磁場中加熱処理装置
Document Type and Number:
Japanese Patent JP5324863
Kind Code:
B2
Inventors:
Takashi Miki
Application Number:
JP2008213883A
Publication Date:
October 23, 2013
Filing Date:
August 22, 2008
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
F27B17/00; C21D1/04; F27D7/06; F27D11/12; H01L21/26
Domestic Patent References:
| JP49129604A | ||||
| JP63278226A | ||||
| JP2004211167A | ||||
| JP2004263206A | ||||
| JP10287921A |
Foreign References:
| WO2007067312A1 |
Attorney, Agent or Firm:
Etsushi Kotani
Masataka Otani
Muramatsu Toshiro
Masataka Otani
Muramatsu Toshiro