Title:
【発明の名称】洗浄・乾燥方法
Document Type and Number:
Japanese Patent JP3082809
Kind Code:
B2
More Like This:
| JPS5873396 | CLEANING METHOD |
Inventors:
Yasuhiro Tsubaki
Toshio Hattori
Masakatsu Tsuji
Haruo Hagiwara
Kiyomi Yamada
Toshio Hattori
Masakatsu Tsuji
Haruo Hagiwara
Kiyomi Yamada
Application Number:
JP31554592A
Publication Date:
August 28, 2000
Filing Date:
November 02, 1992
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
D06F43/00; D06F43/08; (IPC1-7): D06F43/08; D06F43/00
Domestic Patent References:
| JP61160474A | ||||
| JP2162522A |
Attorney, Agent or Firm:
Takao Karaki