Title:
ワイヤソーの加工液ノズル
Document Type and Number:
Japanese Patent JP5775381
Kind Code:
B2
Inventors:
Yosuke Hasegawa
Yasuhiro Ito
Hiroyuki Hashimoto
Yasuhiro Ito
Hiroyuki Hashimoto
Application Number:
JP2011143196A
Publication Date:
September 09, 2015
Filing Date:
June 28, 2011
Export Citation:
Assignee:
Komatsu NTC Ltd.
International Classes:
B24B57/02; B24B27/06; B28D5/04; H01L21/304
Domestic Patent References:
| JP2000141221A | ||||
| JP2005169605A | ||||
| JP2004195555A | ||||
| JP10329024A | ||||
| JP2011183503A |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda
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