Title:
ACTIVATED CARBON CATALYST DECOMPOSITION METHOD FOR REMOVING HYDROGEN PEROXIDE IN SULFURIC ACID WASTE
Document Type and Number:
WIPO Patent Application WO/2021/002601
Kind Code:
A1
Abstract:
The present invention relates to a retention-type activated carbon catalyst decomposition method for removing hydrogen peroxide in sulfuric acid waste. More specifically, the present invention relates to a method for refining a sulfuric acid by decomposing hydrogen peroxide in sulfuric acid waste, which is generated during wafer cleaning in a semiconductor manufacturing process, by means of an activated carbon catalyst. The semiconductor industry in Korea is developing and growing at a world-class level. With respect to same, sulfuric acid waste inevitably comprising hydrogen peroxide is generated. There currently are insufficient recycling technologies other than disposal by means of a calcium neutralization method or preparation of iron sulfate and water treatment agent. The present invention allows a thin sulfuric acid to be prepared and utilized as an industrial resource by means of a method for refining by removing impurities from sulfuric acid waste, and thus allows great advantages of environmental pollution prevention and economical cost reduction for the industry.
Inventors:
JUNG YOUNG NAM (KR)
Application Number:
PCT/KR2020/007315
Publication Date:
January 07, 2021
Filing Date:
June 05, 2020
Export Citation:
Assignee:
JUNG YOUNG NAM (KR)
S J TECH (KR)
S J TECH (KR)
International Classes:
C01B17/90; B01J20/20; B01J23/745; B01J35/10; B01J37/02; B01J37/08
Foreign References:
| KR20130014014A | 2013-02-06 | |||
| KR20180051250A | 2018-05-16 | |||
| KR20120024514A | 2012-03-14 | |||
| KR20150094514A | 2015-08-19 | |||
| KR19990022224A | 1999-03-25 | |||
| KR102047212B1 | 2019-11-20 |
Attorney, Agent or Firm:
OAM PATENT & TRADEMARK LAW FIRM (KR)
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