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Patent Searching and Data


Title:
ADAPTIVE POLISHING HEAD
Document Type and Number:
WIPO Patent Application WO/2019/029605
Kind Code:
A1
Abstract:
An adaptive polishing head (100), comprising: a pivot component (10), a base body (30) and a clip component (20); the pivot component (10) is composed of a shaft body (11) and a disc body (12), the base body (30) is provided with a shaft hole (31) suitable for cooperating with the shaft body (11), and the clip component (20) is provided with a groove (21) suitable for cooperating with the disc body (12); an annular flange (15) is provided at the outer peripheral wall of the disc body (12), the outer peripheral surface of the annular flange (15) being in line contact with the inner peripheral wall of the groove (21).

Inventors:
ZHAO DEWEN (CN)
LU XINCHUN (CN)
CHEN XIANGYU (CN)
Application Number:
PCT/CN2018/099568
Publication Date:
February 14, 2019
Filing Date:
August 09, 2018
Export Citation:
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Assignee:
UNIV TSINGHUA (CN)
HWATSING TECH CO LTD (CN)
International Classes:
B24B37/11; B24B29/02; B24B37/04
Foreign References:
CN107363717A2017-11-21
CN108044484A2018-05-18
TW248386B
US6572462B12003-06-03
US20140120805A12014-05-01
JP2001121410A2001-05-08
CN103072077A2013-05-01
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (CN)
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