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Title:
ALUMINA SINTERED COMPACT, METHOD OF MANUFACTURING SAME, AND COMPONENT FOR SEMICONDUCTOR MANUFACTURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2019/026871
Kind Code:
A1
Abstract:
Provided is an alumina sintered compact containing, in terms of oxide, 0.01–1.0 mass% of at least one selected from Ta, Nb, and V. The alumina sintered compact may also contain, in terms of oxide, 0.01–1.0 mass% of Mg. The alumina sintered compact especially preferably has an alumina purity of at least 99%. As a result, an alumina sintered compact having lower dielectric loss than in the prior art can be inexpensively obtained.

Inventors:
ETO SHUNICHI (JP)
FUKUO OSANOBU (JP)
SAITOU KIYOTAKA (JP)
Application Number:
PCT/JP2018/028547
Publication Date:
February 07, 2019
Filing Date:
July 31, 2018
Export Citation:
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Assignee:
FERROTEC CERAMICS CORP (JP)
International Classes:
C04B35/117; H01L21/3065
Foreign References:
JP2015125896A2015-07-06
JPH07237965A1995-09-12
JP2003112963A2003-04-18
JP2013525241A2013-06-20
JP2008266095A2008-11-06
JP2001072462A2001-03-21
JP2015163569A2015-09-10
JPH04356922A1992-12-10
JPH0859338A1996-03-05
JPH09102488A1997-04-15
Other References:
See also references of EP 3659990A4
Attorney, Agent or Firm:
BRIGHTAS IP ATTORNEYS (JP)
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