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Title:
AMINOSILANE COMPOUND, AND SILICON-CONTAINING THIN FILM DEPOSITION COMPOSITION COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2021/060677
Kind Code:
A2
Abstract:
The present invention relates to an aminosilane compound and a silicon-containing thin film composition comprising same and, more specifically, to: an aminosilane compound which has properties suitable for usability as a precursor for forming a silicon-containing thin film and which can be used in place of chlorosilane; and a silicon-containing thin film composition comprising same.

Inventors:
YOON SANG WOONG (KR)
YANG HAN YONG (KR)
KIM HYOUNG NAM (KR)
JO GUN HYUNG (KR)
Application Number:
PCT/KR2020/008857
Publication Date:
April 01, 2021
Filing Date:
July 07, 2020
Export Citation:
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Assignee:
DUKSAN TECHOPIA CO LTD (KR)
International Classes:
C07F7/10; C23C16/24; C23C16/30; C23C16/34; C23C16/36; C23C16/40; C23C16/455
Attorney, Agent or Firm:
KIM, Jeongeun (KR)
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