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Patent Searching and Data


Title:
ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/179102
Kind Code:
A1
Abstract:
In this invention, a charged particle beam irradiation device irradiates a charged particle beam onto a sample and detects a signal emitted from the sample. A first processing unit (10) is capable of communicating with a first input device (11) and analyzes the sample on the basis of a detection signal from the charged particle beam irradiation device and according to a signal from the first input device (11). A second processing unit (20) is capable of communicating with a second input device (21) and the first processing unit (10), generates a sample observation image from the detection signal from the charged particle beam irradiation device, and controls the charged particle beam irradiation device according to the signal from the second input device (21). The second input device (21) includes a pointing device. The second processing unit (20) converts input made through operation of the pointing device into a control signal for the charged particle beam irradiation device.

Inventors:
ISHIKAWA TAKEHIRO (JP)
Application Number:
PCT/JP2019/031802
Publication Date:
September 10, 2020
Filing Date:
August 13, 2019
Export Citation:
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Assignee:
SHIMADZU CORP (JP)
International Classes:
G01N23/2252; H01J37/24; H01J37/252
Foreign References:
JP2000292383A2000-10-20
JP2010107334A2010-05-13
JP2007086011A2007-04-05
JP2003098129A2003-04-03
JP2011043348A2011-03-03
JPH0351749A1991-03-06
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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