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Patent Searching and Data


Title:
APPARATUS FOR HANDLING SEMICONDUCTOR PHOTOMASK
Document Type and Number:
WIPO Patent Application WO/2021/080343
Kind Code:
A1
Abstract:
The present invention relates to an apparatus for transporting a substrate in an SMIF pod and adjusting a position, the apparatus comprising: a lifter for releasing a locker that fixes a cover of the pod on a base and for lifting the cover; a cover gripper for opening a cover of an inner box provided in the pod by approaching the cover from opposite sides; a pair of substrate grippers for holding the substrate placed on the inner box by approaching the substrate from opposite sides; a status inspection unit including a sensor for automatically identifying the pod and the substrate and inspecting states of the substrate and the handling apparatus such that a single pod and dual pods can be used in combination; a substrate correcting unit for correcting the substrate state in the pod according to an inspected state by the status inspection unit; and controllers respectively connected to the lifter, the cover gripper, the substrate gripper, the status inspection unit, and the substrate correcting unit to control the operations of the lifter, the cover gripper, the substrate grippers, the status inspection unit, and the substrate correcting unit.

Inventors:
CHOI YONG KYOO (KR)
YEO SEUNG YONG (KR)
Application Number:
PCT/KR2020/014481
Publication Date:
April 29, 2021
Filing Date:
October 22, 2020
Export Citation:
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Assignee:
SUN SEMICONDUCTOR (KR)
International Classes:
G03F7/20; H01L21/67; H01L21/677; H01L21/687
Foreign References:
KR20190047321A2019-05-08
KR100593424B12006-06-30
KR20190047344A2019-05-08
JP2001509465A2001-07-24
US20030062578A12003-04-03
Attorney, Agent or Firm:
KIM, Jung Su (KR)
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