Title:
APPARATUS FOR MANUFACTURING LIGHT-EMITTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/172114
Kind Code:
A1
Abstract:
An apparatus for manufacturing a light-emitting device is provided which makes it possible to continuously perform steps from formation to sealing of a light-emitting element. This light-emitting device manufacturing apparatus is capable of forming fine organic EL devices having high luminance and high reliability, said manufacturing apparatus being capable of continuously carrying out a film formation step for forming an organic EL device, a lithography step, an etching step, and a step for sealing by formation of a protective layer. In addition, the manufacturing apparatus is of an in-line type in which devices are arranged in the order of the steps for manufacturing light-emitting devices, and is capable of carrying out the manufacturing with high throughput.
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Inventors:
EGUCHI SHINGO (JP)
ADACHI HIROKI (JP)
OKAZAKI KENICHI (JP)
YAMANE YASUMASA (JP)
KUSUMOTO NAOTO (JP)
YOSHIZUMI KENSUKE (JP)
YAMAZAKI SHUNPEI (JP)
ADACHI HIROKI (JP)
OKAZAKI KENICHI (JP)
YAMANE YASUMASA (JP)
KUSUMOTO NAOTO (JP)
YOSHIZUMI KENSUKE (JP)
YAMAZAKI SHUNPEI (JP)
Application Number:
PCT/IB2022/050738
Publication Date:
August 18, 2022
Filing Date:
January 28, 2022
Export Citation:
Assignee:
SEMICONDUCTOR ENERGY LAB (JP)
International Classes:
H01L21/677; H01L51/50; H05B33/10
Domestic Patent References:
| WO2008066103A1 | 2008-06-05 |
Foreign References:
| JP2018521459A | 2018-08-02 | |||
| JP2010040956A | 2010-02-18 | |||
| JP2007335203A | 2007-12-27 | |||
| JP2001102170A | 2001-04-13 | |||
| KR101926386B1 | 2018-12-07 | |||
| JP2004307976A | 2004-11-04 | |||
| JP2013149961A | 2013-08-01 | |||
| JP2015090810A | 2015-05-11 |
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