Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
APPARATUS FOR REMOVING STATIC ELECTRICITY OF SEMICONDUCTOR SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2023/017998
Kind Code:
A1
Abstract:
The present invention relates to an apparatus for neutralizing static electricity formed on a semiconductor substrate and a pattern positioned on the semiconductor substrate by using VUV light and, more specifically, to a technology for easily removing static electricity embedded in a thin film on a large-area semiconductor substrate by expanding the range of VUV light irradiated to a semiconductor substrate The apparatus for removing static electricity of a semiconductor substrate, according to the present invention, which removes static electricity formed on the semiconductor substrate, by irradiating vacuum ultraviolet ray (VUV) light to the semiconductor substrate placed inside the vacuum chamber, the apparatus comprising: a VUV generator including a VUV lamp placed on the upper side of a vacuum chamber to emit narrow-band VUV light into the vacuum chamber; and a light diffusion unit placed on the lower side of the VUV generator to diffuse incident VUV light in a broad band and output same to the semiconductor substrate located at the lower side.

Inventors:
NA SEOUNG-JU (KR)
PARK HEUNG-GYOON (KR)
Application Number:
PCT/KR2022/008958
Publication Date:
February 16, 2023
Filing Date:
June 23, 2022
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NEXTIN INC (KR)
International Classes:
H01J37/32; G02B3/00; G02B5/02; G02B27/10; H05F3/00
Foreign References:
JP2014148706A2014-08-21
KR20210021671A2021-03-02
JP2010199239A2010-09-09
KR102125063B12020-06-19
KR20040105356A2004-12-16
Attorney, Agent or Firm:
ISIS IP LAW LLC (KR)
Download PDF: