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Patent Searching and Data


Title:
ARMATURE UNIT, MOTOR, STAGE DEVICE, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2002/075905
Kind Code:
A1
Abstract:
A low cost armature unit capable of reducing the generated amount of eddy current in a cabinet (cooling jacket) covering coils and hard to deteriorate even if exposed to a high energy light beam, a motor, a stage device, an exposure device, and a method of manufacturing a device; the armature unit, comprising coils (31) and the cabinet (32) for storing the coils therein, wherein flow passages (33) for cooling medium are formed between the coils and the cabinet, and the portions of the cabinet receiving magnetic field from an external magnetism generating body are formed with a radiationproof nonconductive material (32a).

Inventors:
TANAKA TOSHIHISA (JP)
Application Number:
PCT/JP2002/002304
Publication Date:
September 26, 2002
Filing Date:
March 12, 2002
Export Citation:
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Assignee:
NIPPON KOGAKU KK (JP)
TANAKA TOSHIHISA (JP)
International Classes:
H01L21/027; G03F7/20; H02K9/19; H02K41/02; H02K41/03; (IPC1-7): H02K41/03
Foreign References:
US6084319A2000-07-04
JP2001231246A2001-08-24
JP2002010618A2002-01-11
JPH05275755A1993-10-22
JPH0384385U1991-08-27
JPS6339456A1988-02-19
Attorney, Agent or Firm:
Furuya, Fumio (9th Floor 19-5, Nishishinjuku 1-Chom, Shinjuku-ku Tokyo, JP)
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