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Title:
ARRAY SUBSTRATE EMPLOYING BPS TECHNOLOGY AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/061724
Kind Code:
A1
Abstract:
An array substrate employing BPS technology and a manufacturing method thereof. The manufacturing method of an array substrate employing BPS technology involves provision of a black matrix (83), a main photo spacer (81) and a sub photo spacer (82) at an array substrate in the same manufacturing process, such that production time and production costs can be reduced, thereby increasing product competitiveness. A thickness of a color resist unit (41) is employed to realize a height difference between the main photo spacer (81) and the black matrix (83). The thickness of the color resist unit (41) is also employed, in combination with control of optical transmittance of a mask, to realize a height difference between the sub photo spacer (82) and the black matrix (83), such that heights of the main photo spacer (81) and the sub photo spacer (82) can be controlled easily. Since a region of a black light-shielding film (60) at which the black matrix (83) is correspondingly formed corresponds to a fully transparent region (72) of a mask plate in an exposure process and is exposed to an adequate dose of ultraviolet radiation during exposure, a BPS material undergoes a thorough cross-linking reaction, has high stability, and is less affected by a developing solution in a developing process, such that the BPS material is not dissolved, thereby ensuring a uniform film thickness of the black matrix (83).

Inventors:
YU CHENGZHONG (CN)
Application Number:
PCT/CN2017/110979
Publication Date:
April 04, 2019
Filing Date:
November 15, 2017
Export Citation:
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Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
G02F1/1335; G02F1/1339; G02F1/1362; G02F1/1368
Foreign References:
CN107039352A2017-08-11
CN106992149A2017-07-28
CN106773400A2017-05-31
CN107193162A2017-09-22
CN105974636A2016-09-28
JP2003215575A2003-07-30
Attorney, Agent or Firm:
COMIPS INTELLECTUAL PROPERTY OFFICE (CN)
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