AUTOFOCUS DEVICE AND OPTICAL DEVICE AND MICROSCOPE EQUIPPED WITH SAME

WIPO Patent Application WO/2019/159627

A1

This autofocus device is provided with: a stage (ST) which supports a glass member (19) on which a sample (20) is placed; a magnifying optical system (L2, HM, DM, OL) for observing the sample (20); light source devices (11, M, 13) which radiate light to the sample (20) via the magnifying optical system; an iris (IR) positioned on the opposite side of the magnifying optical system from the sample (20) and limiting the radiated light radiated from the light source devices; and an AF camera (22) which receives reflected light that has passed through the magnifying optical system, wherein the reflected light is the radiated light reflected from a reflection surface (S) after passing through the iris (IR) and the magnifying optical system and reaching a glass member (19). The light source device radiates light at a non-zero angle (φ) with respect to the axis of the magnifying optical system. The control device (100) adjusts the position of the stage (ST) so that the position of a captured image of a shielding object coincides with a target position. By achieving said configuration, high-speed autofocus may be achieved.

YASUI MASATO (JP)
HIROSHIMA MICHIO (JP)
UEDA MASAHIRO (JP)

PCT/JP2019/002216

August 22, 2019

January 24, 2019

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RIKEN (JP)

G02B7/28; G02B7/32; G02B21/26; G03B13/36; H04N5/225; H04N5/232

JP2015227940A	2015-12-17
JP2004004634A	2004-01-08
JP2003029130A	2003-01-29
JPH1089953A	1998-04-10
US20110188053A1	2011-08-04

FUKAMI PATENT OFFICE, P.C. (JP)

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