Title:
BELLOWS DIAPHRAGM ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2022/153868
Kind Code:
A1
Abstract:
A diaphragm assembly for a mass flow controller is disclosed. The diaphragm assembly includes an aperture, side walls extending from the aperture and disposed about a central axis, the side walls including multiple convolutions, and a poppet including an interior surface facing the aperture and exterior sealing surface. At least a portion of the diaphragm assembly moveably extends and retracts within a control valve cavity of the mass flow controller. A push rod extending from the interior surface of the poppet moves, responsive to an actuator of the mass flow controller, to enable the exterior sealing surface of the poppet to open and close a flow path through the control valve cavity.
Inventors:
JOHNSON RYAN (US)
KAWAKAMI KEN (US)
KAWAKAMI KEN (US)
Application Number:
PCT/JP2021/048753
Publication Date:
July 21, 2022
Filing Date:
December 28, 2021
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
G05D7/00
Domestic Patent References:
| WO2020066727A1 | 2020-04-02 |
Foreign References:
| JP2006084004A | 2006-03-30 | |||
| US20190138033A1 | 2019-05-09 | |||
| JP2020056430A | 2020-04-09 |
Attorney, Agent or Firm:
KOHNO, Hideto et al. (JP)
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