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Title:
BUFFER CHAMBER UNIT FOR WAFER PROCESSING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2018/124462
Kind Code:
A1
Abstract:
The present invention relates to a buffer chamber unit for wafer processing equipment.

Inventors:
KIM TAEHOON (KR)
Application Number:
PCT/KR2017/012720
Publication Date:
July 05, 2018
Filing Date:
November 10, 2017
Export Citation:
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Assignee:
SNW COMPANY LTD (KR)
International Classes:
H01L21/677; H01L21/67; H01L21/673
Foreign References:
KR20130109680A2013-10-08
KR20140038280A2014-03-28
JP2003142552A2003-05-16
JP2010050458A2010-03-04
KR20070051195A2007-05-17
Attorney, Agent or Firm:
SHIN, Kyoungho (KR)
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