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Title:
BULK ACOUSTIC RESONATOR, DOPING CONCENTRATION DETERMINATION METHOD, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/068562
Kind Code:
A1
Abstract:
The present disclosure relates to a bulk acoustic resonator, comprising: a substrate; an acoustic mirror; a bottom electrode; a piezoelectric layer, the piezoelectric layer being a piezoelectric layer comprising a doping element, the doping element having a corresponding doping concentration; and a top electrode,wherein the resonator has at resonance frequency higher than 2.5 GHz, and has a layer thickness ratio E/P; the resonator has an electromechanical coupling coefficient Kt2; and the doping concentration is less than a1, a1 being a doping concentration corresponding to the electromechanical coupling coefficient Kt2 when the layer thickness ratio E/P = 3. The present disclosure also relates to a doping concentration determination method, the doping concentration being a doping concentration of a doping element of a piezoelectric layer of a bulk acoustic resonator, the resonator having an electromechanical coupling coefficient Kt2, the resonator having a resonant frequency higher than 2.5 GHz and having a layer thickness ratio E/P, the method comprising the steps of: on the basis of the layer thickness ratio E/P, selecting the doping concentration to be less than a1, a1 being a doping concentration corresponding to the electromechanical coupling coefficient Kt2 when the layer thickness ratio of the resonator E/P = 3. The present disclosure also relates to a filter and an electronic device.

Inventors:
PANG WEI (CN)
XU YANG (CN)
YANG QINGRUI (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2021/117934
Publication Date:
April 07, 2022
Filing Date:
September 13, 2021
Export Citation:
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Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02; H03H9/17; H03H9/54
Foreign References:
CN111030636A2020-04-17
CN111010131A2020-04-14
CN111313857A2020-06-19
CN109889177A2019-06-14
CN111010120A2020-04-14
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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