BULK ACOUSTIC RESONATOR, FILTER, AND ELECTRONIC DEVICE

Title:

BULK ACOUSTIC RESONATOR, FILTER, AND ELECTRONIC DEVICE

Document Type and Number:

WIPO Patent Application WO/2021/004127

Kind Code:

A1

Abstract:

A bulk acoustic resonator, comprising: a substrate; an acoustic mirror (30); a bottom electrode (10) disposed on the substrate and having a bottom electrode metal connection layer (13); a top electrode (12) opposite to the bottom electrode (10) and having a top electrode metal connection layer (14); and a piezoelectric layer (11) disposed on the bottom electrode (10) and between the bottom electrode (10) and the top electrode (12), wherein the overlapping region of the acoustic mirror (30), the bottom electrode (10), the piezoelectric layer (11), and the top electrode (12) in the thickness direction of the resonator constitutes the effective region of the resonator; the top electrode metal connection layer (14) and the bottom electrode metal connection layer (13) are arranged around 50% or more of the peripheral length of the effective region in total. Also provided are a filter and an electronic device having same.

Inventors:

ZHANG MENGLUN (CN)
PANG WEI (CN)
YANG QINGRUI (CN)

Application Number:

PCT/CN2020/086558

Publication Date:

January 14, 2021

Filing Date:

April 24, 2020

Export Citation:

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Assignee:

UNIV TIANJIN (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)

International Classes:

H03H9/17

Foreign References:

CN111010132A	2020-04-14
CN1855711A	2006-11-01
CN101527551A	2009-09-09
US20170338799A1	2017-11-23
US20140152152A1	2014-06-05
JP2007208728A	2007-08-16

Other References: