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Patent Searching and Data


Title:
BULK ACOUSTIC RESONATOR PROVIDED WITH NON-CONDUCTIVE INSERTION LAYER, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/073022
Kind Code:
A1
Abstract:
A bulk acoustic resonator, which comprises: a substrate; an acoustic lens (18); a bottom electrode (10); a top electrode (12); and a piezoelectric layer (11). An edge part of the top electrode (12) is provided with a gap part, a gap is present between the gap part and the piezoelectric layer (11) in the thickness direction of the resonator, and a non-conductive insertion layer (13) is provided in at least a part of the gap. The present invention further relates to a filter and an electronic device.

Inventors:
ZHANG MENGLUN (CN)
PANG WEI (CN)
YANG QINGRUI (CN)
Application Number:
PCT/CN2020/076226
Publication Date:
April 22, 2021
Filing Date:
February 21, 2020
Export Citation:
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Assignee:
UNIV TIANJIN (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02; H03H9/17; H03H9/56
Foreign References:
CN110166018A2019-08-23
CN1705226A2005-12-07
CN108336982A2018-07-27
US7602102B12009-10-13
US8330325B12012-12-11
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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