Title:
BULK ACOUSTIC WAVE RESONANCE DEVICE AND BULK ACOUSTIC WAVE FILTER
Document Type and Number:
WIPO Patent Application WO/2021/042342
Kind Code:
A1
Abstract:
A bulk acoustic wave resonance device (200), comprising: a first layer, the first layer comprising a first cavity on a first side; a first electrode layer, located on the first side, a first end of the first electrode layer being in contact with the first layer, and a second end of the first electrode layer being located in the first cavity; a second layer, located on the first electrode layer; and a second electrode layer, located on the second layer, a first portion on the first electrode layer that coincides with the second electrode layer being located in the first cavity. Since a resonance region (209) does not coincide with the first layer, and the resonance region (209) is suspended with respect to the first cavity, so that a difference between acoustic impedances of the resonance region (209) and a non-resonance region can be increased, thereby increasing a Q value of the resonance device. In addition, the second layer comprises a piezoelectric layer (205), and the piezoelectric layer (205) does not comprise a significantly steered crystal, thereby facilitating increasing an electromechanical coupling coefficient and the Q value of the resonance device.
Inventors:
LIU YUHAO (CN)
Application Number:
PCT/CN2019/104599
Publication Date:
March 11, 2021
Filing Date:
September 05, 2019
Export Citation:
Assignee:
LIU YUHAO (CN)
International Classes:
H03H9/17; H03H3/02
Foreign References:
| CN103296992A | 2013-09-11 | |||
| CN103296992A | 2013-09-11 | |||
| CN107689781A | 2018-02-13 | |||
| CN107222181A | 2017-09-29 | |||
| US8330556B2 | 2012-12-11 |
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