Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
BULK ACOUSTIC WAVE RESONANCE DEVICE, FILTER DEVICE, AND RADIO FREQUENCY FRONT-END DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/036026
Kind Code:
A1
Abstract:
Provided in the present embodiment are a bulk acoustic wave resonance device, a filter device and a radio frequency front-end device. The bulk acoustic wave resonance device comprises: a first layer comprising a cavity; a first electrode layer having at least one end located in the cavity; a piezoelectric layer, which is located on the first electrode layer to cover the cavity and comprises a first side and a second side opposite the first side, the first electrode layer being located on the first side; a second electrode layer located on the second side and on the piezoelectric layer, the portion of the second electrode layer that overlaps the first electrode layer being located above the cavity and corresponding to the cavity; and a first composite structure, which is located on the first side, comes into contact with the piezoelectric layer, and is adjacent to the first electrode layer in a horizontal direction, wherein a first end of the first composite structure close to the first electrode layer is located in the cavity, and a second end thereof opposite the first end in the horizontal direction and away from the first electrode layer is embedded into the first layer; and the first composite structure comprises a first edge extension layer and a first support layer that is located between the piezoelectric layer and the first edge extension layer. The bulk acoustic wave resonance device is used to reduce fringe capacitance, increase an electromechanical coupling coefficient, and block leaky waves, thereby increasing a Q value.

Inventors:
HAN XING (CN)
ZHOU JIAN (CN)
Application Number:
PCT/CN2022/116064
Publication Date:
March 16, 2023
Filing Date:
August 31, 2022
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CHANGZHOU CHEMSEMI CO LTD (CN)
International Classes:
H03H9/02; H03H9/56
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW (CN)
Download PDF: